Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components

Abstract

This project provided a proof-of-concept that indium tin oxide (ITO) thin films can be prepared on surfaces by pulsed laser deposition and configured as miniature strain gauges. The degree of piezoresistivity of the films is related to the oxygen content, with larger gauge factors correlated with oxygen excess. Typical gauge factors of order 10 were observed. Gauges as small as 20x 100 microns were fabricated by focused ion beam milling and characterized. Radiation effects from ion beam milling were observed and measured. Structures encapsulated with silicon dioxide protective films retailed their piezoresistive coefficient and were less susceptible to damage by focused ion beam imaging.

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Document Details

Document Type
Technical Report
Publication Date
Nov 07, 2003
Accession Number
ADA422237

Entities

People

  • Robert A. Weller

Organizations

  • Vanderbilt University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Charge Carriers
  • Coatings
  • Computer Science
  • Electrical Properties
  • Electronic Mail
  • Elements
  • Fabrication
  • Films
  • Ion Beams
  • Materials
  • Measurement
  • Micro-Machines
  • Partial Pressure
  • Radiation
  • Semiconductors
  • Strain Gages
  • Thin Films

Readers

  • Fluid Dynamics.
  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition