Fabrication and Optical Recombination in III-Nitride Microstructures and Devices

Abstract

The research program at Kansas State University is to develop innovative approaches for fabricating high quality III- nitride QWs, heterostructures, microstructures, and micro-devices and to study their optical and optoelectronic properties. By optimizing the epilayer mobilities and optical emission properties, we have produced GaN,Al(x)Ga(1-x)N (x up to 1), In(x)Ga(1-x)N (x<0.3), and In(x)Al( y)Ga(1-x-y)N epilayers, III-nitride QWs with device qualities. We have successfully fabricated micro-size blue emitters and developed a bonding scheme that allows us to address micro-size pixels individually in an array comprising many 111-nitride micro-emitters/micro-detectors. We have demonstrated the operation of the first prototype blue microdisplay made from InGaN/GaN QWs. We have achieved highly conductive n-type Al(x)Ga(1-x)N alloys of high Al contents (for x up to 0.8). We have developed Mg-delta-doping for enhanced p-type doping efficiency in GaN and AlGaN. A 2-fold enhancement in lateral and a 5-fold enhancement in vertical p-type conductions have been achieved for AlGaN and AlGaN epilayers. We have also achieved AlN epilayers with very efficient band-edge PL emission the optical quality of AlN is comparable to that of GaN and determined the detailed band structure near the gamma point of wurtzite AlN, including energy gap, optical selection rules, exciton binding energies and lifetimes, and acceptor/donor energy levels.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2003
Accession Number
ADA422324

Entities

People

  • Hongxing Jiang
  • Jingyu Lin

Organizations

  • Kansas State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Gaps
  • Band Structures
  • Chemical Vapor Deposition
  • Compound Semiconductors
  • Detectors
  • Electronics Laboratories
  • Energy Bands
  • Energy Gaps
  • Fabrication
  • Materials
  • Materials Science
  • Metal-Semiconductor Junctions
  • Optical Properties
  • Optoelectronic Devices
  • Quantum Efficiency
  • Quantum Wells
  • Semiconductors

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics