IR Detector Wafer Production
Abstract
This report results from a contract tasking Charles University as follows: The contractor will investigate the production of CdTe/CdZnTe crystals for use as substrates for epitaxial growth of HgCdTe layers for infrared focal plane array detectors. The contractor will develop a process for producing surfaces on CdZnTe wafers with surface finish (Ra) of 7 nm or less, flatness of 1 micron or less. and parallelism of 1 micron or less. using a wafer polishing machine.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2003
- Accession Number
- ADA425092
Entities
People
- Pavel Hoschl
Organizations
- Charles University