Miniaturization Science for Space: Lubrication of Micro-Electro-Mechanical Systems (MEMS) for Space Environments

Abstract

This program has focused on the influence of temperature and vacuum pressures on a number of tribological materials considered as candidates for incorporation into MEMs fabrication. These materials have included silane-based alkyl self-assembled monolayers (SAMs), diamond like carbon (DLC) films and SiC. Fundamental measurements performed on the operational length scale of MEMs devices (nanometer to micron) demonstrate a significant influence of these environmental parameters. In addition, HUV friction measurements on model surfaces have sought to establish a systematic understanding of the temperature dependence of the forces acting at sliding interfaces. This work has considered the frictional properties of a series of single crystal surfaces in the absence of wear or interfacial chemistry. The results of these measurements have allowed the consideration of a number of fundamental contributing effects to the temperature dependence of sliding friction.

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Document Details

Document Type
Technical Report
Publication Date
Aug 04, 2004
Accession Number
ADA425415

Entities

People

  • Scott S. Perry

Organizations

  • University of Houston

Tags

Communities of Interest

  • Advanced Electronics
  • Space

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemistry
  • Data Acquisition
  • Environment
  • Films
  • Friction
  • Lubrication
  • Materials
  • Materials Science
  • Measurement
  • Microelectromechanical Systems
  • Monomolecular Films
  • Self Assembled Monolayers
  • Single Crystals
  • Sliding Friction
  • Space Environments

Readers

  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems
  • Space