A MEMS Floating Element Shear Stress Sensor for Hypersonic Flows

Abstract

This report describes the results of a nine-month study to develop a proof of concept, high-bandwidth, high-resolution, silicon micromachined piezoresistive floating element shear-stress sensor for the measurement of unsteady hypersonic flow phenomena. The work focused on three parts: (1) modeling, optimization, and fabrication of a piezoresistive-based micromachined, floating element shear stress sensor, (2) modeling, fabrication, and testing of an optical geometric Moire' interferometry-based floating element sensor, and (3) test facility development and characterization.

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Document Details

Document Type
Technical Report
Publication Date
Jul 29, 2004
Accession Number
ADA425861

Entities

People

  • Bruce Carroll
  • James P. Hubner
  • Louis N Cattafesta
  • Mark Sheplak

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Channel Flow
  • Computational Fluid Dynamics
  • Dynamic Response
  • Fabrication
  • Flow
  • Fluid Dynamics
  • Fluid Mechanics
  • High Resolution
  • Hypersonic Flow
  • Materials Science
  • Measurement
  • Mechanics
  • Pressure Measurement
  • Shear Stresses
  • Stresses
  • Test Facilities
  • Wind Tunnels

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Fiber Sensing and Electromagnetic Propagation.
  • Structural Health Monitoring of Composite Structures.

Technology Areas

  • Hypersonics
  • Hypersonics - Hypersonic Flow