Broadband Plasma Impedance Measurements and Determination of Plasma Parameters

Abstract

A small spherical probe is used in conjunction with a network analyzer to determine the impedance of the probe-plasma system over a wide frequency range. Impedance curves are in good agreement with accepted circuit modes with plasma-sheath and electron plasma frequency resonances easily identifiable. Phase measurements show clear transitions between capacitive and inductive modes as predicted by the model. Sheath thickness and absolute electron density are determined from the location of these transitions. In addition, much larger power absorption is observed at the sheath plasma resonance than is predicted by collisional absorption.

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Document Details

Document Type
Technical Report
Publication Date
Sep 20, 2004
Accession Number
ADA426684

Entities

People

  • D. N. Walker
  • David D. Blackwell
  • William E. Amatucci

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Absorption
  • Analyzers
  • Broadband
  • Capacitance
  • Charged Particles
  • Electron Density
  • Electrons
  • Frequency
  • Impedance
  • Langmuir Probes
  • Measurement
  • Military Research
  • Phase
  • Plasma Sheaths
  • Resonance
  • Resonant Frequency
  • Thickness

Fields of Study

  • Physics

Readers

  • Microwave Engineering.
  • Plasma Physics / Magnetohydrodynamics

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems