Microelectromechanical System Pressure Sensor for Projectile Applications

Abstract

A miniaturized high pressure sensor for cannon-launched munitions was fabricated, based on microelectromechanical system (MEMS) technology. It uses a 0.5 microns thin film of lead zirconate titanate (PZT) material for producing an electrical charge that is directly proportional to the pressure. The sensor was mounted on a customized stainless steel housing, placed into a high pressure vessel, and tested to a maximum pressure of 40,000 psi. The shape and configuration of the platinum (Pt)/PZT/Pt layered structure has been redesigned to reduce the complexity of wire interconnections and to increase the charge output of the device.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2004
Accession Number
ADA426855

Entities

People

  • Eugene S. Zakar

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Base Pressure
  • Chemistry
  • Complementary Metal-Oxide Semiconductors
  • Department Of Defense
  • Electron Microscopes
  • Electron Microscopy
  • Fabrication
  • Films
  • High Pressure
  • Lead Zirconate Titanates
  • Materials
  • Microelectromechanical Systems
  • Military Research
  • Pressure Measurement
  • Projectiles
  • Stainless Steel
  • Thin Films

Readers

  • Explosive Engineering.
  • Integrated Circuit Design and Technology.
  • ballistics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems