Herstellung and Untersuchung con (Ba,Sr)TiO3-Duennschichten fuer zukuenftige hochintegrierte Halbleiterspeichr (Manufacture and Testing of (Ba,Sr)TiO3 Thin Layers for Future Highly Integrated Semiconductor Storage)

Abstract

This study is concerned with the morphological and electrical qualities of thin mixed crystal systems in (Ba,Sr) TiO3 layers that were shed out of the gas phase through metal-organic chemical vapor deposition. Influence parameters, such as field and temperature, layer thickness, stoichiometry, and electrode materials, as well as manufacturing conditions, are discussed. An essential difficulty that arose from this investigation involved the employment of mixed crystal systems as a non-transient relaxation streams in a short time frame and discusses present physical mechanisms. High frequency experiments rounded out the tests on non-conductor relaxation.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2001
Accession Number
ADA427657

Entities

People

  • Karl Hornik

Organizations

  • Bundeswehr University Munich

Tags

DTIC Thesaurus Topics

  • Barium Strontium Titanates
  • Barium Titanates
  • Ceramic Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Crystals
  • Dielectric Permittivity
  • Dielectric Properties
  • Dielectrics
  • Electrical Properties
  • Epitaxial Growth
  • Manufacturing
  • Materials
  • Materials Science
  • Optical Properties
  • Semiconductors
  • Solid State Physics

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Theoretical Analysis.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene