A Novel Processing Technique for Growing Bulk Gallium Nitride Ingots From Gallium Melt

Abstract

In summary, a new process is being developed to obtain free standing, large area, near single crystal quality GaN flake (highly oriented GaN films) promising as native substrates for homoepitaxial growth of device quality, low-defect density GaN layers. However, the experiments to date resulted only in GaN flakes of sizes around 1 sq cm due to the following reasons: (a) the wetting and flow of molten Ga affected the flatness of the Ga film surfaces during the nucleation and coalescence of GaN crystals (b) the flow of Ga through cracks or discontinuities within the films limited the area of highly oriented GaN films. Currently, two types of experiments involving substrate stage rotation and in-Situ Ga delivery are being conducted to overcome the above difficulties. Similarly, MOCVD deposition studies onto GaN flakes are planned for making several mm thick ingots.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2004
Accession Number
ADA428486

Entities

People

  • Hari Chandrasekaran
  • Hongwei Li
  • Mahendra K. Sunkara
  • Sreeram Vaddiraju

Organizations

  • University of Louisville

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Chemistry
  • Compound Semiconductors
  • Crystal Growth
  • Crystals
  • Energy Bands
  • Epitaxial Growth
  • Field Effect Transistors
  • Gallium Nitrides
  • Liquid Phase Epitaxy
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Nitrogen Compounds
  • Self Assembly
  • Semiconductors
  • Silicon Carbide

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene