Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components

Abstract

The original motivation for this work was to develop coating for metallic MEMS components to improve their performance and reliability. During a review of refractory oxides a report came to our attention that indium tin oxide (ITO), well known as the most widely used transparent conductor, is also piezoresistive. Thus, in principle, coating of ITO either alone or in combination with other thin films might be both protective and electrically functional.

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Document Details

Document Type
Technical Report
Publication Date
Dec 11, 2003
Accession Number
ADA429177

Entities

People

  • Robert A. Weller

Organizations

  • Vanderbilt University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Charge Carriers
  • Coatings
  • Computer Science
  • Electrical Properties
  • Electronic Mail
  • Elements
  • Fabrication
  • Films
  • Ion Beams
  • Materials
  • Measurement
  • Micro-Machines
  • Partial Pressure
  • Radiation
  • Semiconductors
  • Strain Gages
  • Thin Films

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Nanofabrication and Microfabrication.
  • Software Engineering.