Development of Film Actuator Operated by Magnetic Field for Micro-Machine

Abstract

Fe-Pd alloy films, prepared by using a DC magnetron Sputtering method, were developed as a high sensitive actuator, which was driven by the magnetic field. Fe-Pd alloy film shows large magnetostriction and high magnetostrictive susceptibility under 1 kOe. To evaluate the moving potential as magneto-driving actuator, the magnetostrictive properties were measured under different tensile loading stresses. Although the small tensile loading stress decreased the maximum value of magnetostriction, strong magneto-driving actuator of the Fe-Pd allow film could be constantly operated by the magnetic field under larger loading stress for high magnetostrictive susceptibility.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2003
Accession Number
ADA429535

Entities

People

  • Hiromasa Yabe
  • Yoshitake Nishi

Organizations

  • Tokai University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Actuators
  • Crystal Structure
  • Electron Microscopy
  • Equations
  • Films
  • Laboratory Magnetometers
  • Magnetic Fields
  • Magnetic Properties
  • Magnetostriction
  • Magnetrons
  • Materials
  • Materials Science
  • Resistance
  • Sputtering
  • Thermal Conductivity
  • Thin Films

Readers

  • Materials Science and Engineering.
  • Structural Health Monitoring of Composite Structures.