Micro Piezoelectric Ultrasonic Motors
Abstract
This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced: windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5mm in diameter and O.8mNm in torque have been actually developed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 17, 2003
- Accession Number
- ADA429652
Entities
People
- B. Koc
- Kenji Uchino
- P. Bouchilloux
- S. Cagatay
- Sheng Dong
Organizations
- Pennsylvania State University