Multiple Strategy Bio-Detection Sensor Platforms Made from Carbon and Polymer Materials

Abstract

The goal of this project is to develop a new class of biosensors using carbon and polymer based micro electromechanical systems (CPMEMS) and a platform that incorporates multiple biodetection strategies. This report discusses the progress to date on the biosensors made from CPMEMS and the multiple strategy biodetection sensor platforms that incorporate these CPMEMS. An alternative sacrificial layer in the individual CPMEMS layer processing in being developed using a thermal release polymer. Development of a test lithography mask set and a wafer level packaging scheme in underway. Advancements in the areas of active technology in the form of sense and release experiments and the molecular bridge preparation of the CPMEMS surface have been made.

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Document Details

Document Type
Technical Report
Publication Date
Jan 29, 2005
Accession Number
ADA429916

Entities

People

  • Kartik Ghosh
  • Matt Curry
  • Paul Durham
  • Rishi Patel
  • Ryan Giedd

Organizations

  • Missouri State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Biosensors
  • Detection
  • Detectors
  • Electron Beams
  • Etching
  • Fabrication
  • Films
  • Ion Implantation
  • Lithography
  • Manufacturing
  • Materials
  • Materials Processing
  • Materials Science
  • Microelectromechanical Systems
  • Microscopes
  • Packaging
  • Polymers

Fields of Study

  • Engineering

Readers

  • Electrochemical Surface Science
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design

Technology Areas

  • Biotechnology
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems