Development of a Micro- and Nano-Fabrication Facility

Abstract

The purpose of this project was to develop the first multiuser micro and nanofabrication facility at The City College of New York (CCNY). Four pieces of equipment were acquired under this award: (i) Spin Coating System from Laurell Technologies; (ii) Ozone Stripper from Samco; (iii) Reactive Ion Etcher from Samco; and (iv) Evaporator/Sputtering system from Denton Vacuum. In addition, our school provided additional matching funds that enabled this research group to also purchase a Deep-UV Exposure System from Optical Analysis Instruments. This facility has fostered several research grant awards and applications from the PIs, has encouraged the development of undergraduate and graduate courses involving micro and nanotechnology at CCNY, and has enabled the PIs to mentor a total of 15 undergraduate and 11 graduate researchers via projects that utilize the facility.

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Document Details

Document Type
Technical Report
Publication Date
Dec 08, 2004
Accession Number
ADA430328

Entities

People

  • Alexander Couzis
  • Charles Maldarelli
  • David Rumschitzki
  • Lane Gilchrist
  • Maribel Vazquez

Organizations

  • City College of New York

Tags

Communities of Interest

  • Biomedical

DTIC Thesaurus Topics

  • Air Force
  • Biomedical Engineering
  • Chemical Engineering
  • Confocal Microscopy
  • Department Of Defense
  • Detection
  • Detectors
  • Engineering
  • Fabrication
  • Materials Science
  • Nanofabrication
  • Nanotechnology
  • New York
  • Optical Analysis
  • Self Assembled Monolayers
  • Spin Coatings
  • United States

Readers

  • Nanofabrication and Microfabrication.
  • Research Science/Academic Research

Technology Areas

  • Biotechnology