Modeling, Fabrication, and Testing of a Piezoelectric MEMS Vibrational Energy Reclamation Device

Abstract

A piezoelectric vibrational energy reclamation device using sol-gel PZT/surface micromachining technology is described for the low power supply of microsystems; converting environmental vibration into useful electrical energy for powering microsystems. The design is appropriate for the power generation of low power remote MEMS sensor network nodes. Electro-mechanical modeling, fabrication, and testing of PZT MEMS are presented. Power generation of 1.54 mW/sq. cm at 700 Hz/50 micrometers amplitude is predicted.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 2005
Accession Number
ADA430925

Entities

People

  • Jeffrey S. Pulskamp

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Amplitude
  • Demographic Cohorts
  • Electric Power
  • Energy
  • Energy Conversion
  • Energy Harvesting
  • Fabrication
  • Frequency Response
  • Laser Doppler Vibrometers
  • Measurement
  • Micro-Machines
  • Microelectromechanical Systems
  • Micromachining
  • Modulus Of Elasticity
  • Resonant Frequency
  • Thin Films
  • Vibration

Fields of Study

  • Engineering
  • Physics

Readers

  • Energy Conservation and Renewable Energy Engineering.
  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.