RF MEMS Improvement Program
Abstract
The work performed under this task was in support of DARPA Special Projects Office (SPO) Micro Electro Mechanical Systems (MEMS) switch development efforts. The MEMS programs supported were developed and supervised by various DARPA/SPO program managers. During 2000 and early 2001, it became increasingly apparent that the RF MEMS switches and phase shifters being fabricated by all of the contractors working under various DARPA/SPO programs, that were directed toward using these components in various DoD system applications, suffered from various reliability problems which hampered their ability to function properly. In addition, no packages meeting DARPA's electrical and environmental system demands were available, at an acceptable cost, to house these devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 2005
- Accession Number
- ADA431552
Entities
People
- Eliot D. Cohen