Synthesis of Multifunction Materials
Abstract
Perovskite phase of PZT films have been formed On sapphire substrates and Pt/Ti/SiO2/Si and Ir/Ti/SiO2/Si substrates by RF sputtering and sol gel techniques. Structural, in the form of X-ray diffraction, optical in the form of absorption/transmission and spectroscopic ellipsometry, scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), and electrical measurements, in the form of polarization vs. electric field (or voltage) in capacitors have been performed. For electrical characterization, the top electrodes for Au/PZT/Pt and Au/PZT/Ir capacitors were fabricated by photolithography and liftoff process. The Ir bottom electrodes were obtained from Samsung Advanced Institute of Technology as part of a collaborative effort. The photolithography and wet etching conditions (HF, HF:H2O2:HNO3) were optimized to explore scheduled mulflfimctional device applications. The polarization hysteresis and fatigue characteristics were measured by using a ferroelectric tester. In order to prepare better quality perovskite film, all the necessary source and other configurational modifications have been completed in oxides MBE and growth runs are eminent.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 13, 2005
- Accession Number
- ADA431688
Entities
People
- Hadis H. Morkoç̌
Organizations
- Virginia Commonwealth University