Uncooled Infrared Detector Arrays With Electrostatically Levitated Sensing Elements
Abstract
The goals of this project were to develop the technologies necessary to implement a new, non-contacting infrared sensing element. As described in our proposal, the sensing element is to be suspended in tension with electrostatic forces within a pixel cavity. The creation of this structure has required the development of a number of MEMS fabrication techniques. We have also developed new circuit topologies to the novel sensing structure.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 28, 2005
- Accession Number
- ADA431988
Entities
People
- Mark A. Reed
- T. Blalock
Organizations
- University of Virginia