Reconfigurable Photonic Bandgap Device With MEMS Features

Abstract

We report on our design and fabrication of a semiconductor based photonic bandgap nano-membrane device with MEMS features. This device could be used as a basic building block for a reconfigurable optoelectronic integrated circuit that can be reprogrammed for many different functionalities.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2004
Accession Number
ADA433142

Entities

People

  • David Mackie
  • Gerard Dang
  • Matthew Ervin
  • Monica Taysing-lara
  • Peter G. Newman
  • Weimin Zhou

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Gaps
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Detectors
  • Electron Beam Lithography
  • Energy Bands
  • Etching
  • Fabrication
  • Integrated Circuits
  • Microelectromechanical Systems
  • Optical Waveguides
  • Photonic Crystals
  • Photonic Integrated Circuits
  • Semiconductors
  • Thick Walls
  • Walls

Readers

  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems