Development of High Resistive and High Magnetization Soft Thin Film and Fabrication of Thin Film Inductors

Abstract

The goals of the program was to develop soft magnetic films, fabricate test structures, to device a microwave inductor and integrate thin film inductor onto CMOS (complimentary metal oxide semiconductor). Six researchers from four different academic departments including materials science, physics, chemical engineering and electrical engineering have conducted their own research projects. This report contains six sub-reports for detailed information on the results.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2004
Accession Number
ADA433358

Entities

People

  • C. A. Berven
  • D. E. Aston
  • G. W. Donohoe
  • J. L. Young
  • Y. K. Hong
  • You Qiang

Organizations

  • University of Idaho

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Electron Beam Lithography
  • Electron Microscopes
  • Laboratory Magnetometers
  • Magnetic Films
  • Magnetic Materials
  • Magnetic Properties
  • Magnetometers
  • Manufacturing
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Measurement
  • Nanoparticles
  • Resonant Frequency
  • Thin Films

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene