RF Discharge at Medium and High Pressure and Its Possibilities for Material Surface Modification
Abstract
During last years the tendency became evident to develop and utilize discharge at medium and high pressure in industry especially for plasma chemical applications and surface modification of materials. The review of the literature 1 devoted to this subjects, on the one hand specifies wide opportunities of such discharges and on the other hand demonstrates absence of detailed understanding of physical processes mechanisms in medium and high pressure discharges as well as mechanisms of its influence on material surface. The present paper represents the first results obtained in the field of systematic study of atmospheric RF discharge parameters together with results of discharge influence on material surface characteristics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 2003
- Accession Number
- ADA433511
Entities
People
- A. F. Alexandrov
- E. A. Kralkina
- G. E. Bugrov
- I. B. Timofeev
- K. V. Vavilin
- V. B. Pavlov
- V. P. Savinov
- V. Plaksin
- V. Yu. Sergeenko
Organizations
- Moscow State University