Capacitive MEMS Microphone Optimized Research

Abstract

This report describes the initial design study of a project to develop a MEMS microphone optimized for photoacoustic signal detection. A MEMS based design has been developed with a predicted sensitivity 48 times that of current state of the art microphones and a 27 dB lower sensitivity to mechanical vibration. This new design is a modification of a commercial MEMS microphone currently in production. Arrangements have been made to produce a commercial prototype of this microphone for photoacoustic applications using a modification of the process that has been proven successful in the manufacture of millions of commercial telecom microphones.

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Document Details

Document Type
Technical Report
Publication Date
Apr 18, 2005
Accession Number
ADA433689

Entities

People

  • John F. Mcclelland
  • Michael B Pedersen

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustics
  • Air Gaps
  • Bandwidth
  • Biological Detection
  • Capacitance
  • Circuits
  • Frequency
  • Human Factors Engineering
  • Instrumentation
  • Lasers
  • Measurement
  • Microelectromechanical Systems
  • Microphones
  • Self Noise
  • Sound Pressure
  • Spectroscopy
  • Transducers

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Software Engineering