Topology Optimization for the Design of 3-D Microelectromechanical Systems (MEMS) Undergoing Coupled Multiphysics Phenomena

Abstract

We developed, implemented, and validated new topology optimization strategies/algorithms for the design of microelectromechanical systems (MEMS) exhibiting coupled multiphysics behavior. The numerical tools include a fully coupled nonlinear electro-thermo-mechanical and electrostatic-mechanical finite element solvers, and novel sensitivity analysis modules that allow the evaluation of the gradients of the coupled response with respect to a large number of optimization variables. These tools have been integrated into the overall topology optimization design environment.

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Document Details

Document Type
Technical Report
Publication Date
Nov 30, 2004
Accession Number
ADA438436

Entities

People

  • Martin L. Dunn

Organizations

  • University of Colorado Boulder

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Environment
  • Fabrication
  • Films
  • Geometric Forms
  • Geometry
  • Lines (Geometry)
  • Materials
  • Mechanical Phenomena
  • Microelectromechanical Systems
  • Micromachining
  • Optimization
  • Thin Films
  • Three Dimensional
  • Topology
  • Topology Optimization
  • Two Dimensional
  • Voltage

Fields of Study

  • Physics

Readers

  • Computational Fluid Dynamics (CFD)
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems