Model-Based Simulations to Engineer Nanoporous Thin Films

Abstract

A model-based simulation (MBS) capability for tailoring the fabrication processes and the properties of wide band gap semiconductors thin films (TF) with engineered nanoscale porosity has been achieved in two ways: 1. By using molecular dynamics simulations (MDS) to relate a given set of deposition parameters to the resulting microstructure. 2. By developing a novel bending theory for a continuum body with microstructure.

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 2004
Accession Number
ADA438559

Entities

People

  • Francesco Costanzo

Organizations

  • Pennsylvania State University

Tags

DTIC Thesaurus Topics

  • Band Gaps
  • Computational Science
  • Engineering
  • Engineers
  • Films
  • Materials
  • Materials Science
  • Mechanical Properties
  • Mechanics
  • Microelectromechanical Systems
  • Microstructure
  • Molecular Dynamics
  • Semiconductors
  • Silicon Carbide
  • Simulations
  • Thin Films
  • Wide Bandgap Semiconductors

Fields of Study

  • Materials science

Readers

  • Computational Fluid Dynamics (CFD)
  • Nanocomposite Materials Science
  • Software Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene