MEMS Colloid Thruster Array
Abstract
TDA designed a single MEMS colloid emitter that can be readily extended to a multi-emitter array. The annular electrodes proposed by TDA and UC-Boulder have high local electric field strength at the nozzle to reduce the voltage needed to activate the electrospray. They also designed a fluidic valve to passively meter flow to each emitter in the array. Detailed micro fabrication process recipes were developed and proven by actually building single emitters. A laboratory test rig has been built, validation tests were conducted using a conventional colloid capillary emitter and tests were attempted using a single MEMS colloid emitter. 0 Annular emitter electrodes - The annular emitter electrode design doubles the electric field strength in comparison to a full base electrode and thus, lowers the voltage needed to activate the electrospray. It can be micro machined using lithography and vapor deposition processes. 0 High voltage dielectrics - Teflon films will be used during colloid emitter development to reduce risk. In parallel task, we will develop and evaluate high quality sputtered silicon dioxide layers based on recent work at the University of Colorado MRTL. Using their equipment and sputter process we can create layers up to 10 pm thick; more than enough for high voltage actuation to 5 kV.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2005
- Accession Number
- ADA438599
Entities
People
- James Nabity