SONICFLIP: An Integrated Platform for Biofluid Monitoring
Abstract
The SonicFlip project created technologies that enable microfluidic integration at a wristwatch scale with Complimentary Metal Oxide Semiconductor, CMOS, electronics compatible voltages and currents. The architecture included a CMOS chip driving an array of piezoelectric actuators. By driving the actuators at different phases, we achieved pumping and mixing. Since each pixel was under electronic control, programmable forces were achieved inside microfluidic channels. A fabrication method was developed to create pillars of magnetic materials between the Lead-Zirconate-Titanate, PZT, and the silicon structure. Novel methods were developed to acoustically separate beads by sizes in an optically observable aperture. A unique flow sensor paradigm using viscous drag on a beam inside a flow channel was invented and implemented. This flow sensing method is scalable to nano-scale and mimics beam flow sensing used by micro and millimeter scale biological cells and insects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 2005
- Accession Number
- ADA441174
Entities
People
- Amit Lal
Organizations
- Cornell University