Micromachined RF Switch With High Mechanical Reliability

Abstract

For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop ,"tri state multi-contact" switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications.

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Document Details

Document Type
Technical Report
Publication Date
Dec 09, 2005
Accession Number
ADA442117

Entities

People

  • Hiroki Mamiya
  • Koji Ishikawa
  • Qiang Yu
  • Takahiro Miki

Organizations

  • Yokohama National University

Tags

DTIC Thesaurus Topics

  • Actuators
  • Cantilever Beams
  • Degradation
  • Dielectrics
  • Fabrication
  • Fatigue Life
  • High Reliability
  • Insertion Loss
  • Losses
  • Materials
  • Microelectromechanical Systems
  • Micromachining
  • Reliability
  • Sensitivity
  • Simulations
  • Switching
  • Test And Evaluation

Readers

  • Integrated Circuit Design and Technology.

Technology Areas

  • Space