Model Development and Control Design for High Speed Atomic Force Microscopy
Abstract
This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2004
- Accession Number
- ADA444057
Entities
People
- Andrew G. Hatch
- Ralph C. Smith
- Tathagata De
Organizations
- North Carolina State University