Carbon Deposition on Blade Surfaces of Laser Microactuator for Optical MEMS
Abstract
A laser opto-microactuator has been proposed as an Optical Micro-Electro-Mechanical-Systems (OMEMS). The rotational or twisting mechanisms of the microactuator have been discussed. For increasing the sensitivity of the actuator, the temperature difference between the front and rear blade surfaces of the actuator should be increased. Therefore, high absorption rates on the blade surface with laser beam irradiation and low heat conductivities of blade materials are needed. In the present paper experimental and numerical approaches have been carried out. For increasing the absorption rates of a laser beam on the blades of the microactuator, carbon molecules were deposited from a heated carbon fiber to substrates in a vacuum deposition machine. The deposition rates were experimentally measured and are compared with the numerical results by DSMC.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 13, 2005
- Accession Number
- ADA445978
Entities
People
- M. Ota
- S. K. Stefanov
- Ying He
Organizations
- Tokyo Metropolitan University