Motion of Nanoparticles in Rarefied Gas Flows
Abstract
Solar cells have been made from hydrogenated amorphous silicon (a-Si:H) films. The films including Si nanoparticles by 3% in the volume fraction have been found to possess good properties. In order to find the method to control this volume fraction, the motion of Si nanoparticles in the rarefied flow of H2 and SiH4 is examined for a CVD (chemical vapor depositiion) reactor by use of the DSMC method.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 13, 2005
- Accession Number
- ADA446045
Entities
People
- K. Nanbu
- T. Otsuka
Organizations
- Tohoku University