Nanomechanical Resonant Structures in Nanocrystalline Diamond

Abstract

We report the fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond. For this purpose, continuous diamond films as thin as 80 nm were grown using microwave plasma enhanced chemical vapor deposition. The lateral dimensions of the fabricated structures were as small as 50 nm and the measured mechanical resonant frequencies were up to 640 MHz. The mechanical quality factors were in the range of 2500 3000 at room temperature. The elastic properties of these films obtained via the resonant measurements indicate a Young's modulus close to that of single-crystal diamond.

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Document Details

Document Type
Technical Report
Publication Date
Dec 02, 2002
Accession Number
ADA447722

Entities

People

  • B. H. Houston
  • H. G. Craighead
  • J. E. Butler
  • J. M. Parpia
  • L. Sekaric
  • T. Feygelson

Organizations

  • Cornell University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Chemistry
  • Crystals
  • Diamond Films
  • Elastic Properties
  • Electron Beam Lithography
  • Fabrication
  • Films
  • Frequency
  • Materials
  • Mechanical Properties
  • Military Research
  • Modulus Of Elasticity
  • Physics
  • Resonant Frequency
  • Single Crystals
  • Vapor Deposition

Fields of Study

  • Materials science
  • Physics

Readers

  • Mechanical Engineering/Mechanics of Materials.
  • Nanoscale Plasmonic Nanotechnology
  • Thin Film Deposition Science.