Fabrication and Characterization of a Micro Turbine/Bearing Rig

Abstract

This paper reports on a process to build, package, and instrument a 5-level wafer-bonded micro-machined turbine/bearing rig. The process flow involves the use of 5 wafers, 16 masks, and 9 deep silicon etching steps. It also utilizes aligned wafer bonding, double-sided deep reactive ion etching (DRIE), and Laser-Assisted-Etching (LAE). The paper also presents experimental results on flow characteristics of the hydrostatic thrust bearings and the preliminary rotational performance of the device.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2006
Accession Number
ADA447928

Entities

People

  • Alan H. Epstein
  • Arturo A. Ayón
  • Chuang-chia Lin
  • Dye-zone Chen
  • Kenneth S. Breuer
  • Martin A. Schmidt
  • Reza Ghodssi
  • Stuart Jacobson

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Acquisition
  • Bearings
  • Data Acquisition
  • Detectors
  • Fabrication
  • Flow
  • Flow Rate
  • Gas Bearings
  • Gas Turbines
  • Guide Vanes
  • Journal Bearings
  • Laser Beams
  • Measurement
  • Pressure Measurement
  • Pressure Regulators
  • Thrust Bearings
  • Turbines

Fields of Study

  • Engineering

Readers

  • Aerodynamics.
  • Nanofabrication and Microfabrication.
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).

Technology Areas

  • Directed Energy