Thermal Expansion of Ti-Containing Hydrogenated Amorphous Carbon Nanocomposite Thin Films

Abstract

The effective coefficients of thermal expansion (CTE) of Ti-containing hydrogenated amorphous carbon (Ti-C:H) thin films were measured. Ti-C:H thin films with compositions ranging from nearly pure alpha-C:H to nearly pure TiC were deposited on Si(100) substrates. Effective CTEs were determined from temperature induced changes in the curvature of film/substrate assemblies. Measured effective CTE values for Ti-C:H are 5.7 x 10(exp -6) K(exp -1), and show little dependence on the Ti composition.

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Document Details

Document Type
Technical Report
Publication Date
Sep 16, 2004
Accession Number
ADA450900

Entities

People

  • B. Shi
  • T. L. Daulton
  • W. J. Meng

Organizations

  • National Science Foundation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Assembly
  • Charge Coupled Devices
  • Coefficients
  • Composite Materials
  • Curvature
  • Films
  • Materials
  • Measurement
  • Nanocomposites
  • Physical Properties
  • Physics
  • Shape
  • Spectra
  • Spectroscopy
  • Substrates
  • Thermal Expansion
  • Thin Films

Readers

  • Thin Film Deposition Science.