Nanoimprinting of Micro-Optical Components Fabricated using Stamps Made with Proton Beam Writing

Abstract

Investigation of the process of nanoimprinting in combination with proton beam writing with Ni electroplating for the replication of optical components in polymer substrates through nanoimprinting.

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Document Details

Document Type
Technical Report
Publication Date
Jul 26, 2006
Accession Number
ADA451625

Entities

People

  • A. A. Bettiol
  • F. Watt
  • Jeroen A. Van Kan
  • T. Osipowicz

Organizations

  • National University of Singapore

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Charged Particles
  • Deep Ultraviolet Lithography
  • Electroplating
  • Fabrication
  • Information Operations
  • Ion Beams
  • Ions
  • Lithography
  • Materials
  • Numerical Aperture
  • Proton Beams
  • Protons
  • Singapore
  • Software Prototyping
  • Standards
  • Substrates
  • Waveguides

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Solar Physics