Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2000
Accession Number
ADA451933

Entities

People

  • G. M. Kepler
  • H. T. Tran
  • H. Thomas Banks
  • S. C. Beeler

Organizations

  • North Carolina State University

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  • Advanced Electronics

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  • Thin Films
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