Reduced Order Based Compensator Control of Thin Film Growth in a CVD Reactor

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2000
Accession Number
ADA451936

Entities

People

  • H. T. Tran
  • H. Thomas Banks

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Advanced Electronics
  • Counter WMD

DTIC Thesaurus Topics

  • Algorithms
  • Chemical Reactions
  • Chemical Vapor Deposition
  • Computational Fluid Dynamics
  • Computational Science
  • Control Systems
  • Differential Equations
  • Equations
  • Equations Of State
  • Films
  • Fluid Dynamics
  • Formulas (Mathematics)
  • High Pressure
  • Materials
  • Optical Properties
  • Thin Films
  • Three Dimensional