Experimental Implementation of a Model-Based Inverse Filter to Attenuate Hysteresis in an Atomic Force Microscope

Abstract

This paper addresses the development and experimental validation of a model-based, open loop control design for mitigating the frequency-dependent effects of hysteresis in an atomic force microscope (AFM). The models are based on homogenized energy relations which characterize the hysteretic constitutive behavior of the piezoceramic AFM stage. Approximate model inverses are then employed as filters to linearize transducer dynamics for control design. When experimentally implemented in open loop control designs, inverse compensation in this manner produces an approximately tenfold increase in tracking accuracy as compared with the unfiltered case.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2004
Accession Number
ADA452004

Entities

People

  • Andrew Hatch
  • Ralph G. Smith
  • Tathagata De

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Actuators
  • Crystal Structure
  • Displacement
  • Electric Fields
  • Electrical Engineering
  • Equations
  • Hysteresis
  • Materials
  • Mechanics
  • Microscopes
  • Modulus Of Elasticity
  • Orientation (Direction)
  • Piezoelectric Effect
  • Single Crystals
  • Statistical Mechanics
  • Stresses

Fields of Study

  • Engineering

Readers

  • Image Processing and Computer Vision.
  • Mechanical Engineering/Mechanics of Materials.
  • Robotics and Automation.