Model Development and Inverse Compensator Design for High Speed Nanopositioning

Abstract

This paper focuses on the development of constitutive models, commensurate system models, and inverse compensator construction for high speed nanopositioning in atomic force microscopes (AFM). All current AFM employ either stacked or cylindrical piezoceramic actuators for both longitudinal and transverse positioning of the sample. An inherent property of these materials is the presence of hysteresis and constitutive nonlinearities, even at the low drive levels employed for angstrom-level resolution. At low frequencies, standard feedback mechanisms effectively attenuate the hysteresis, whereas noise at high frequencies diminishes the efficacy of feedback and leads to unacceptable accuracy. In this paper, we discuss modeling techniques which provide a first step toward high speed nanopositioning for applications ranging from macroscopic product evaluation to real-time imaging of biological processes.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADA453933

Entities

People

  • Andrew Hatch
  • Joshua Smith
  • Murti V. Salapaka
  • Ralph C. Smith
  • Tathagata De

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Actuators
  • Algorithms
  • Compensators
  • Constitutive Equations
  • Construction
  • Control Systems
  • Domain Walls
  • Electric Fields
  • Electrical Engineering
  • Energy
  • Experimental Data
  • Frequency
  • Materials
  • Modulus Of Elasticity
  • North Carolina
  • Piezoceramics

Readers

  • Control Systems Engineering.
  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology