MEMS-Based Quartz Oscillators and Filters for On-Chip Integration

Abstract

We report on the development of a new microelectronic mechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss are also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2005
Accession Number
ADA455656

Entities

People

  • D. T. Chang
  • F. P. Stratton
  • M. K. Lim
  • R. J. Joyce
  • R. L. Kubena
  • R. T. M'closkey
  • T. Y. Hsu

Organizations

  • HRL Laboratories

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Communication Systems
  • Compound Semiconductors
  • Electronics
  • Fabrication
  • Frequency
  • Frequency Shift
  • Manufacturing
  • Materials
  • Materials Laboratories
  • Measurement
  • Micro-Machines
  • Microelectromechanical Systems
  • Micromachining
  • Oscillators
  • Quartz Resonators
  • Resonant Frequency
  • Standards

Fields of Study

  • Engineering
  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Phased Array Antenna Design.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems