Sputtering Studies of Multi-Component Materials by Weight Loss and Cavity Ring-Down Spectroscopy (Postprint)

Abstract

We report sputtering studies of multi-component spacecraft materials. We employ two complementary diagnostic methods: weight loss measurements and cavity ring-down spectroscopy (CRDS). The weight loss measurements provide total sputter yields as a function of ion energy and incidence angle. We present sputter yields from weight loss measurements for xenon ion sputtering of molybdenum, quartz, boron nitride, and kapton. The CRDS provides species-specific sputtering data (number density and velocity) as well as information on the differential (angular) sputtering distributions. We present CRDS results for the sputtering of molybdenum (from a molybdenum sample), and demonstrate measurements of multi-component materials by measuring the sputtering of chromium, iron, and molybdenum from Inconel 718.

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Document Details

Document Type
Technical Report
Publication Date
Jun 26, 2006
Accession Number
ADA456831

Entities

People

  • Azer P. Yalin
  • Casey Farnell
  • John D. Williams
  • Mark Butweiller
  • Vijaya Surla

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Absorption Coefficients
  • Air Force Research Laboratories
  • Astronautics
  • Body Weight
  • Ceramic Materials
  • Chromium
  • Detection
  • Elements
  • Energy Levels
  • Frequency
  • Materials
  • Measurement
  • Mechanical Engineering
  • Scattering
  • Spacecraft
  • Spectra
  • Spectroscopy

Readers

  • Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Space
  • Space - Hall-Effect Thruster