High Resolution Non-Contact Thermal Characterization Semiconductor Devices

Abstract

Non-contact optical methods can be used for sub micron surface thermal characterization of active semiconductor devices. Point measurements were first made, and then real time thermal images were acquired with a specialized PINarray detector. This method of thermal imaging can have spatial resolution better than the diffraction limit of an infrared camera and can work in a wide range of ambient temperatures. The experimentally obtained thermal resolution is on the order of 50mK.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2006
Accession Number
ADA458443

Entities

People

  • Ali H. Shakouri
  • Daryoosh Vashaee
  • Jack Baskin
  • James Christofferson
  • Philip Melese

Organizations

  • University of California, Santa Cruz

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Calibration
  • Cameras
  • Detectors
  • Dynamic Range
  • Fabrication
  • Frequency
  • Images
  • Infrared Cameras
  • Light Sources
  • Measurement
  • Radiation
  • Reflection
  • Semiconductor Devices
  • Semiconductors
  • Thermal Images
  • Thermocouples

Readers

  • Integrated Circuit Design and Technology.
  • Medical Imaging.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene