Miniaturization Science for Space: Lubrication of Micro-Electro-Mechanical Systems (MEMS) for Space Environments

Abstract

In this study, the vapor phase lubrication of interacting gold surfaces has been investigated on the atomic and molecular level using the quartz crystal microbalance (QCM), atomic force microscopy (AFM) and scanning tunneling microscopy (STM). These techniques have provided a fundamental understanding of the molecular nature of adsorption, adhesion, and current flow occurring at gold interfaces through the formation of self-assembled monolayers (SAMs) of conjugated aromatic thiol molecules. The issues of static adhesion and contact performance have been addressed simultaneously in relation to the nature and composition of the interface. Maps of both current and adhesion demonstrated the potential of using conjugated species with fluorine substituents on the basis of their tribological and electrical behavior as candidates for lubricating Au/Au interfaces in MEMS devices. Although they do not form a closely-packed geometry compared to n-alkanethiol SAMs, they however provide hydrophobic, "Teflon-like" surfaces which accounts for the observed low adhesion.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 2006
Accession Number
ADA458531

Entities

People

  • Scott S. Perry

Organizations

  • University of Houston

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Adhesion
  • Adsorption
  • Ceramic Materials
  • Chemistry
  • Films
  • Fluorine
  • Friction
  • Geometry
  • Lubrication
  • Measurement
  • Microbalances
  • Microelectromechanical Systems
  • Monomolecular Films
  • Quartz Crystal Microbalances
  • Self Assembled Monolayers
  • Space Environments
  • Vapor Phases

Readers

  • Electrochemical Surface Science
  • Nanoscale Plasmonic Nanotechnology
  • Quantum Chemistry

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Space