Thermoreflectance Imaging of Superlattice Micro Refrigerators

Abstract

High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental setup, we expect to obtain thermal images with sub-micron spatial resolution.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2001
Accession Number
ADA458816

Entities

People

  • Ali H. Shakouri
  • Chris Labounty
  • Daryoosh Vashaee
  • Edward T. Croke
  • Gehong Zeng
  • James Christofferson
  • John E. Bowers
  • Philip Melese
  • Xiaofeng Fan

Organizations

  • University of California, Santa Cruz

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Cameras
  • Communication Systems
  • Dynamic Range
  • Electronics
  • Electronics Laboratories
  • Engineering
  • Field Effect Transistors
  • High Dynamic Range
  • High Resolution
  • Integrated Circuits
  • Lasers
  • Light Sources
  • Materials
  • Metal Oxide Semiconductors
  • Reflection
  • Semiconductors
  • Thermal Images

Fields of Study

  • Engineering

Readers

  • Computer Vision.
  • Integrated Circuit Design and Technology.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems