Template-Growth of Highly Ordered Carbon Nanotube Arrays on Silicon POSTPRINT

Abstract

This paper reports on the success in and the key conditions for direct growth or carbon nanotubes or unprecedented uniformity on silicon. The uniformity is ensured through the growth within the highly ordered nanopores or an alumina oxide template, which is in turn formed on silicon through anodization of aluminum of unprecedented thickness evaporated on silicon. The formation of highly ordered nanopore array by anodization of thick aluminum evaporated on a noncompliant substrate such as silicon is made possible through a specially designed process for evaporating thick aluminum of high quality and good adhesion.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2006
Accession Number
ADA460085

Entities

People

  • Aijun Yin
  • David Cardimona
  • Jimmy Xu
  • Marian Tzolov

Organizations

  • Brown University

Tags

DTIC Thesaurus Topics

  • Adhesion
  • Air Force
  • Air Force Research Laboratories
  • Aluminum
  • Aluminum Oxides
  • Anodizing
  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Films
  • Fullerenes
  • Materials
  • Materials Processing
  • Nanopores
  • Nanotechnology
  • Substrates
  • Template Patterns
  • Thickness

Readers

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