Development of an Uncooled Photomechanic Infrared Sensor Based on the IR Organ of the Pyrophilous Jewel Beetle Melanophila Acuminata
Abstract
Initial efforts focused on the MEMS materials development effort including deposition and patterning process for chitosan, and more recent work resulted in the development of a photolithography process for chitosan compatible with traditional microfabrication processes. In order to realize a bio-inspired imaging system based on melanophila acuminata, the polysaccharide chitosan (a water-soluble derivative of chitin which can be reacetylated back to chitin through post-processing) was engineered from a commercially available power into a thin film compatible with semiconductor microfabrication processes. Substantial, novel work went into the synthesis, characterization, deposition and patterning of chitosan. MEMS compatible fabrication methods were developed. Controlled deposition of chitosan up to 5 um thick, with uniformity of 10% and roughness of less than 1% has been achieved. Stress temperature curves were recorded from amient to dehydrated conditions showing a clear hysteresis curve which can be exploited for exploited for thermal IR transduction purposes.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 04, 2007
- Accession Number
- ADA461022
Entities
People
- Albert P. Pisano
- H. Schmitz
- Luke P Lee
Organizations
- University of California, Berkeley