SiGe/Si Superlattice Coolers
Abstract
The fabrication and characterization of SiGe/Si superlattice coolers are described. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity between the hot and the cold junctions, and by providing selective removal of hot carriers through thermionic emission. Cooling of 2.2 K and 2.5 K were measured on n-type and p-type 75 * 75 micronmeter2 devices, corresponding to cooling power densities of hundreds of watts per square centimeter. Cooling up to 7.2 K was obtained at 150 C for p-type 50 * 50 micronmeter2 devices. The results show that n-type and p-type coolers can work together in similar optimal conditions. This paves the road to fabricate n-type and p-type superlattice coolers in an array format electrically in series and thermally in parallel, similar to conventional thermoelectric devices, and thus achieve large cooling capacities with relatively small currents.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2000
- Accession Number
- ADA461105
Entities
People
- Ali Shakouri
- Chris Labounty
- Edward Croke
- Gehong Zeng
- Gerry Robinson
- Xiaofeng Fan
Organizations
- University of California, Santa Barbara