Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Abstract

Thermal measurements on a sub-micron scale are non-trivial, but are important of the characterization of modern, semiconductor and opto-electronic devices. In this paper we will discuss the application of the thermoreflectance method for real time sub-micron thermal imaging. By using light in the visible spectrum, the diffraction limit, and this spatial resolution is improved over a traditional infrared camera based on blackbody emission. With active excitation of the sample and frequency domain filtering, thermal images with 100 mK temperature resolution are obtained. Experiments performed on semiconductor micro-coolers and micro-heaters are presented.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2001
Accession Number
ADA461268

Entities

People

  • Ali H. Shakouri
  • Daryoosh Vashaee
  • James Christofferson
  • Philip Melese

Organizations

  • University of California, Santa Cruz

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Acquisition
  • Cameras
  • Charge Coupled Devices
  • Diffraction
  • Filtration
  • Frequency
  • High Resolution
  • Images
  • Measurement
  • Parallel Computing
  • Parallel Processing
  • Semiconductor Devices
  • Semiconductors
  • Spectra
  • Thermal Images
  • Visible Spectra

Fields of Study

  • Engineering

Readers

  • Image Processing and Computer Vision.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems