The Effects of Ionising Radiation on MEMS Silicon Strain Gauges: Preliminary Background and Methodology

Abstract

Despite limited reporting in the open literature describing the effects of ionising radiation on MicroElectroMechanical System (MEMS) devices or components, there are indications that some MEMS technologies exhibit vulnerability to radiation effects. To begin to gain an understanding of the issues surrounding the susceptibility of MEMS technologies, an investigation into the effects of radiation damage on the electronic and the mechanical properties of a specific MEMS silicon strain gauge will be conducted. The methodology followed is outlined in this report.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2006
Accession Number
ADA461458

Entities

People

  • Alan Wilson
  • Damian Marinaro
  • Phillip Mcmahon

Organizations

  • Defence Science and Technology Group

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical
  • Counter WMD
  • Energy and Power Technologies
  • Sensors
  • Space

DTIC Thesaurus Topics

  • Aircrafts
  • Altitude
  • Cosmic Rays
  • Detectors
  • Electrical Properties
  • Electrical Resistance
  • Engineering
  • Gamma Rays
  • High Altitude
  • Measurement
  • Mechanical Properties
  • Microelectromechanical Systems
  • Physical Properties
  • Radiation Effects
  • Semiconductors
  • Single Crystals
  • Strain Gages

Readers

  • Integrated Circuit Design and Technology.
  • Mechanical Engineering/Mechanics of Materials.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems