Thermoreflectance Imaging of Superlattice Micro Refrigerators

Abstract

High resolution thermal images of operating micro refrigerators are presented. Using the thermo reflectance method and a high dynamic range PIN array camera, thermal images with 50mK thermal resolution and high spatial resolution are presented. This general method can be applied to any operating semiconductors, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental setup, we expect to achieve sub-micron spatial resolution thermal images.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2001
Accession Number
ADA461899

Entities

People

  • Ali H. Shakouri
  • Chris Labounty
  • Daryoosh Vashaee
  • Edward T. Croke
  • Gehong Zeng
  • James Christofferson
  • John E. Bowers
  • Philip Melese
  • Xiaofeng Fan

Organizations

  • University of California, Santa Cruz

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Cameras
  • Communication Systems
  • Detectors
  • Dynamic Range
  • Electronics Laboratories
  • Engineering
  • Field Effect Transistors
  • High Dynamic Range
  • High Resolution
  • Lasers
  • Light Sources
  • Materials
  • Metal Oxide Semiconductors
  • Reflection
  • Semiconductors
  • Superlattices
  • Thermal Images

Fields of Study

  • Engineering

Readers

  • Computer Vision.
  • Semiconductor Device Technology
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems