Microstructure Technology for Fabrication of Metal-Mesh Grids

Abstract

Motivated by the need for highly efficient far-IR Fabry-Perot etalons for airborne and space astronomy, we have developed a high-yield photolithographic technique for producing low-loss metal-mesh reflectors. We describe the production technique and report on the mesh flatness and uniformity. Optical measurements of meshes produced by this technique show that absorptivity of less than 1% with reflectivity of more than 98% was achieved at the longest wavelengths measured, which proved them to be significantly more efficient than commercially available meshes. This process can achieve wire widths that are less than the mesh thicknesses (typically 3 micrometers), which extends their applicability to wavelengths as short as ~20 micrometers without sacrificing mechanical strength for airborne and space-flight applications. Key words: Fabry-Perot, far-infrared, metal mesh, microstructure technology.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1994
Accession Number
ADA461918

Entities

People

  • Howard A. Smith
  • Jacqueline Fischer
  • Julius Grossman
  • Martin Peckerar
  • Matthew A. Greenhouse
  • Milton Rebbert
  • Peter Isaacson

Organizations

  • Smithsonian Institution

Tags

DTIC Thesaurus Topics

  • Absorption
  • Etching
  • Fabrication
  • Films
  • Lithography
  • Manufacturing
  • Materials
  • Measurement
  • Measuring Instruments
  • Metal Films
  • Microstructure
  • Optics
  • Photolithography
  • Printing
  • Reflectivity
  • Reflectors
  • Surface Roughness

Fields of Study

  • Physics

Readers

  • Computer Networking
  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.

Technology Areas

  • Space
  • Space - Satellites